Eishi Takagi: search on Z-Library

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1

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, USA (Sunday 23 February 2014)] Extreme Ultraviolet (EUV) Lithography V - Contribution of EUV resist components to the non-cleanable contaminations

Wood, Obert R., Panning, Eric M., Shiobara, Eishi, Takahashi, Toshiya, Sugie, Norihiko, Kikuchi, Yukiko, Takagi, Isamu, Katayama, Kazuhiro, Tanaka, Hiroyuki, Inoue, Soichi, Watanabe, Takeo, Harada, Te

Year:

2014

Language:

english

File:

PDF, 855 KB

english, 2014

2

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, United States (Sunday 23 February 2014)] Extreme Ultraviolet (EUV) Lithography V - Correlation study on resist outgassing between EUV and e-beam irradiation

Wood, Obert R., Panning, Eric M., Kikuchi, Yukiko, Katayama, Kazuhiro, Takagi, Isamu, Sugie, Norihiko, Takahashi, Toshiya, Shiobara, Eishi, Tanaka, Hiroyuki, Inoue, Soichi, Watanabe, Takeo, Harada, Te

Year:

2014

Language:

english

File:

PDF, 1.72 MB

english, 2014

3

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, USA (Sunday 24 February 2013)] Extreme Ultraviolet (EUV) Lithography IV - Study of EUV outgassing spatial distribution toward witness plate in the EUV outgas tester

Kikuchi, Yukiko, Naulleau, Patrick P., Shiobara, Eishi, Tanaka, Hiroyuki, Takagi, Isamu, Katayama, Kazuhiro, Sugie, Norihiko, Takahashi, Toshiya, Inoue, Soichi, Watanabe, Takeo, Harada, Tetsuo, Kinosh

Year:

2013

Language:

english

File:

PDF, 867 KB

english, 2013

4

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California (Sunday 12 February 2012)] Extreme Ultraviolet (EUV) Lithography III - Resist outgassing characterization for qualification in high power EUV lithography

Takahashi, Toshiya, Sugie, Norihiko, Katayama, Kazuhiro, Takagi, Isamu, Kikuchi, Yukiko, Shiobara, Eishi, Tanaka, Hiroyuki, Inoue, Soichi, Watanabe, Takeo, Harada, Tetsuo, Kinoshita, Hiroo, Naulleau,

Year:

2012

Language:

english

File:

PDF, 1.83 MB

english, 2012

5

Establishment and Characterization of Resistant Cells to Etoposide (VP16) from a Mouse Breast Cancer Cell Line, FM3A

Eishi Takagi, Hidetaka Kawatsu, Kaoru Shimokata, Yukihiro Nishiyama, Kiyohide Kojima, Shonen Yoshida

Journal:

Year:

1988

File:

PDF, 346 KB

1988

6

Sequence Variations of Epstein-Barr Virus LMP2A Gene in Gastric Carcinoma in Japan

Michiko Tanaka, Yasushi Kawaguchi, Jyunko Yokofujita, Minoru Takagi, Yoshinobu Eishi, Kanji Hirai

Journal:

Year:

1999

Language:

english

File:

PDF, 108 KB

english, 1999

7

Development of Tool for Contamination Layer Thickness Measurement Using High Power Extreme Ultraviolet Light and in Situ Ellipsometer

Watanabe, Takeo, Kikuchi, Yukiko, Takahashi, Toshiya, Katayama, Kazuhiro, Takagi, Isamu, Sugie, Norihiko, Tanaka, Hiroyuki, Shiobara, Eishi, Inoue, Soichi, Harada, Tetsuo, Kinoshita, Hiroo

Journal:

Japanese Journal of Applied Physics

Year:

2013

Language:

english

File:

PDF, 777 KB

english, 2013

8

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, United States (Sunday 22 February 2015)] Extreme Ultraviolet (EUV) Lithography VI - Feasibility study on the impact of high-power EUV irradiation on key lithographic elements

Wood, Obert R., Panning, Eric M., Inoue, Soichi, Mikami, Shinji, Shiobara, Eishi, Takagi, Isamu, Tanaka, Hiroyuki

Year:

2015

Language:

english

File:

PDF, 1014 KB

english, 2015

9

Human Alveolar Macrophages of Anergic Patients with Lung Cancer Lack the Responsiveness to Recombinant Interferon Gamma

Kawatsu, Hidetaka, Hasegawa, Yoshinori, Takagi, Eishi, Shimokata, Kaoru

Journal:

Year:

1991

Language:

english

File:

PDF, 1003 KB

english, 1991

10

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, United States (Sunday 22 February 2015)] Extreme Ultraviolet (EUV) Lithography VI - Collaborative work on reducing the intersite gaps in outgassing qualification

Wood, Obert R., Panning, Eric M., Inoue, Soichi, Shiobara, Eishi, Sasami, Takeshi, Takagi, Isamu, Kikuchi, Yukiko, Fujimori, Toru, Minegishi, Shinya, Berg, Robert, Lucatorto, Thomas, Hill, Shannon, Ta

Year:

2015

Language:

english

File:

PDF, 997 KB

english, 2015

11

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, USA (Sunday 24 February 2013)] Extreme Ultraviolet (EUV) Lithography IV - Resist outgassing characterization based on the resist compositions and process

Sugie, Norihiko, Naulleau, Patrick P., Takahashi, Toshiya, Katayama, Kazuhiro, Takagi, Isamu, Kikuchi, Yukiko, Tanaka, Hiroyuki, Shiobara, Eishi, Inoue, Soichi

Year:

2013

Language:

english

File:

PDF, 574 KB

english, 2013

12

Determination of the T-Cell Subset Producing γ-Interferon in Tuberculous Pleural Effusion

Shimokata, Kaoru, Kishimoto, Hirotsugu, Takagi, Eishi, Tsunekawa, Hiroshi

Journal:

Microbiology and Immunology

Year:

1986

Language:

english

File:

PDF, 1016 KB

english, 1986

13

BRAIN FUNCTIONAL MONOTORING AND CONTROL DEVICE

Yambe, Tomoyuki, Takagi, Toshyuki, Asano, Eishi

Journal:

Year:

2005

Language:

english

File:

PDF, 344 KB

english, 2005

14

Simultaneous development of sarcoidosis and cutaneous vasculitis in a patient with refractory Crohn’s disease during infliximab therapy

Numakura, Tadahisa, Tamada, Tsutomu, Nara, Masayuki, Muramatsu, Soshi, Murakami, Koji, Kikuchi, Toshiaki, Kobayashi, Makoto, Muroi, Miho, Okazaki, Tatsuma, Takagi, Sho, Eishi, Yoshinobu, Ichinose, Mas

Journal:

BMC Pulmonary Medicine

Year:

2016

Language:

english

File:

PDF, 2.24 MB

english, 2016

15

Segmental Mediolytic Arteriopathy Involving Celiac to Splenic and Left Renal Arteries

TAKAGI, Chisa, ASHIZAWA, Naoto, EISHI, Kiyoyuki, ASHIZAWA, Kazuto, HAYASHI, Tomayoshi, TANAKA, Kyoei, SETO, Shinji, YANO, Katsusuke

Journal:

Internal Medicine

Year:

2003

Language:

english

File:

PDF, 3.43 MB

english, 2003

16

Recent Progress in EUV Resist Outgas Research at EIDEC

Shiobara, Eishi, Takagi, Isamu, Kikuchi, Yukiko, Sasami, Takeshi, Minegishi, Shinya, Fujimori, Toru, Watanabe, Takeo, Harada, Tetsuo, Kinoshita, Hiroo, Inoue, Soichi

Journal:

Journal of Photopolymer Science and Technology

Year:

2015

Language:

english

File:

PDF, 574 KB

english, 2015

17

Comparison of Resist Family Outgassing Characterization between EUV and EB

Takagi, Isamu, Takahashi, Toshiya, Sugie, Norihiko, Katayama, Kazuhiro, Kikuchi, Yukiko, Shiobara, Eishi, Tanaka, Hiroyuki, Inoue, Soichi, Watanabe, Takeo, Harada, Tetsuo, Kinoshita, Hiroo

Journal:

Journal of Photopolymer Science and Technology

Year:

2013

Language:

english

File:

PDF, 706 KB

english, 2013

18

Comparison of Resist Outgassing Characterization between High Power EUV and EB

Sugie, Norihiko, Takahashi, Toshiya, Katayama, Kazuhiro, Takagi, Isamu, Kikuchi, Yukiko, Shiobara, Eishi, Tanaka, Hiroyuki, Inoue, Soichi, Watanabe, Takeo, Harada, Tetsuo, Kinoshita, Hiroo

Journal:

Journal of Photopolymer Science and Technology

Year:

2012

Language:

english

File:

PDF, 660 KB

english, 2012